Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Yao, Duan, Pavel Terekhov, Xingjie Ni

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 um fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

Original languageEnglish
Title of host publication2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Electronic)9781957171050
StatePublished - 1 Jan 2022
Externally publishedYes
Event2022 Conference on Lasers and Electro-Optics, CLEO 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

Publication series

Name2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

Conference

Conference2022 Conference on Lasers and Electro-Optics, CLEO 2022
Country/TerritoryUnited States
CitySan Jose
Period15/05/2220/05/22

ASJC Scopus subject areas

  • Instrumentation
  • Spectroscopy
  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Management, Monitoring, Policy and Law
  • Materials Science (miscellaneous)
  • Acoustics and Ultrasonics
  • Atomic and Molecular Physics, and Optics

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