Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Duan Yao, Pavel Terekhov, Xingjie Ni

Research output: Contribution to journalConference articlepeer-review


We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

Original languageEnglish
Article numberFF2D.4
JournalOptics InfoBase Conference Papers
StatePublished - 1 Jan 2022
Externally publishedYes
EventCLEO: QELS_Fundamental Science, QELS 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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