Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang; Shengyuan Chang; Xi Chen; Yimin Ding; Md Tarek Rahman; Duan Yao; Pavel Terekhov; Xingjie Ni

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang
, Shengyuan Chang
, Xi Chen
, Yimin Ding
, Md Tarek Rahman
, Duan Yao
, Pavel Terekhov
, Xingjie Ni

Research output: Contribution to journal › Conference article › peer-review

Abstract

We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

Original language	English
Article number	FF2D.4
Journal	Optics InfoBase Conference Papers
State	Published - 1 Jan 2022
Externally published	Yes
Event	CLEO: QELS_Fundamental Science, QELS 2022 - San Jose, United States Duration: 15 May 2022 → 20 May 2022

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Cite this

@article{518b3d36809142af8f3a284d1e039219,

title = "Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography",

abstract = "We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80\% focusing efficiency.",

author = "Lidan Zhang and Shengyuan Chang and Xi Chen and Yimin Ding and Rahman, \{Md Tarek\} and Duan Yao and Pavel Terekhov and Xingjie Ni",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); CLEO: QELS\_Fundamental Science, QELS 2022 ; Conference date: 15-05-2022 Through 20-05-2022",

year = "2022",

month = jan,

day = "1",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

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TY - JOUR

T1 - Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

AU - Zhang, Lidan

AU - Chang, Shengyuan

AU - Chen, Xi

AU - Ding, Yimin

AU - Rahman, Md Tarek

AU - Yao, Duan

AU - Terekhov, Pavel

AU - Ni, Xingjie

PY - 2022/1/1

Y1 - 2022/1/1

N2 - We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

AB - We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.

UR - https://www.scopus.com/pages/publications/85136786116

M3 - Conference article

AN - SCOPUS:85136786116

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - FF2D.4

T2 - CLEO: QELS_Fundamental Science, QELS 2022

Y2 - 15 May 2022 through 20 May 2022

ER -

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Abstract

ASJC Scopus subject areas

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