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Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

  • Lidan Zhang
  • , Shengyuan Chang
  • , Xi Chen
  • , Yimin Ding
  • , Md Tarek Rahman
  • , Duan Yao
  • , Pavel Terekhov
  • , Xingjie Ni

Research output: Contribution to journal › Conference article › peer-review

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